V Mityukhlyaev: search on Z-Library

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1

Calibration of Scanning Electron Microscopes over a Wide Range of Magnifications

Kirtaev, R. V., Kuzin, A. Yu., Maslov, V. G., Mityukhlyaev, V. B., Todua, P. A., Filippov, M. N.

Journal:

Measurement Techniques

Year:

2017

Language:

english

File:

PDF, 231 KB

english, 2017

2

Thermal Effects During Low-Voltage Electron-Probe X-Ray Spectral Microanalysis with Nanometer Localization

Kuzin, A. Yu., Stepovich, M. A., Mityukhlyaev, V. B., Todua, P. A., Filippov, M. N.

Journal:

Measurement Techniques

Year:

2017

Language:

english

File:

PDF, 145 KB

english, 2017

3

A test object with a line width less than 10 nm for scanning electron microscopy

M. A. Danilova, V. B. Mityukhlyaev, Yu. A. Novikov, Yu. V. Ozerin, A. V. Rakov, P. A. Todua

Journal:

Measurement Techniques

Year:

2008

Language:

english

File:

PDF, 167 KB

english, 2008

4

Three-Dimensional Reconstruction of the Surfaces of Relief Structures from Stereoscopic Images Obtained in a Scanning Electron Microscope

Gavrilenko, V. P., Karabanov, D. A., Kuzin, A. Yu., Mityukhlyaev, V. B., Mikhutkin, A. A., Todua, P. A., Filippov, M. N., Baimukhametov, T. N., Vasil’ev, A. L.

Journal:

Measurement Techniques

Year:

2015

Language:

english

File:

PDF, 316 KB

english, 2015

5

Evaluation of the Component of Bias of X-Ray Microanalysis Related to Surface Relief of the Specimen

Vasil’ev, A. L., Mityukhlyaev, V. B., Mikhutkin, A. A., Todua, P. A., Filippov, M. N.

Journal:

Inorganic Materials

Year:

2017

Language:

english

File:

PDF, 270 KB

english, 2017

6

Scanning electron microscopy used to measure the feature dimensions of a nanoscale test pattern on a silicon surface

V. P. Gavrilenko, Yu. V. Larionov, V. B. Mityukhlyaev, A. V. Rakov, P. A. Todua, M. N. Filippov, V. A. Sharonov

Journal:

Russian Microelectronics

Year:

2011

Language:

english

File:

PDF, 1.02 MB

english, 2011

7

Measurement of the Height of Nanorelief Elements by the Method of Three-Dimensional Reconstruction in a Scanning Electron Microscope

Darznek, S. A., Karabanov, D. A., Kuzin, A. Yu., Mityukhlyaev, V. B., Todua, P. A., Filippov, M. N.

Journal:

Measurement Techniques

Year:

2017

Language:

english

File:

PDF, 452 KB

english, 2017

8

Effect of sample contamination in SEMs on linear size measurements

Yu. V. Larionov, V. B. Mityukhlyaev, M. N. Filippov

Journal:

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

Year:

2008

Language:

english

File:

PDF, 315 KB

english, 2008

9

Measurement of the linear dimensions of nanorelief elements with a trapezoidal profile by defocusing the electron beam of a scanning electron microscope

V. P. Gavrilenko, A. Yu. Kuzin, Yu. V. Larionov, V. B. Mityukhlyaev, A. V. Rakov, P. A. Todua, M. N. Filippov

Journal:

Measurement Techniques

Year:

2012

Language:

english

File:

PDF, 171 KB

english, 2012

10

Electron Probe Measurements of Oxide Film Thickness on Silicon Surfaces

Gavrilenko, V. P., Kuzin, A. Yu., Mityukhlyaev, V. B., Stepovich, M. A., Todua, P. A., Filippov, M. N.

Journal:

Measurement Techniques

Year:

2015

Language:

english

File:

PDF, 199 KB

english, 2015

11

Electron-beam-induced oxidation of CdS

V.B. Mityukhlyaev

Journal:

Applied Surface Science

Year:

1994

Language:

english

File:

PDF, 397 KB

english, 1994

12

Test object of the linewidth with a trapezoidal profile and three certified sizes for an SEM and AFM

Gavrilenko, V P, Mityukhlyaev, V B, Novikov, Yu A, Ozerin, Yu V, Rakov, A V, Todua, P A

Journal:

Measurement Science and Technology

Year:

2009

Language:

english

File:

PDF, 979 KB

english, 2009

13

Thermal Action of an Electronic Probe with X-ray Spectral Nanoanalysis

Amrastanov, A. N., Kuzin, A. Yu., Mityukhlyaev, V. B., Seregina, E. V., Stepovich, M. A., Todua, P. A., Filippov, M. N.

Journal:

Measurement Techniques

Year:

2017

Language:

english

File:

PDF, 281 KB

english, 2017

14

Distortion of the Profile of Surface Relief Elements of Single-Crystal Silicon Caused by Contamination in a Low-Voltage Scanning Electron Microscope

V. P. Gavrilenko, A. Yu. Kuzin, V. B. Mityukhlyaev, A. V. Rakov…

Journal:

Measurement Techniques

Year:

2013

Language:

english

File:

PDF, 154 KB

english, 2013

15

UCN sources at external beams of thermal neutrons. An example of PIK reactor

Lychagin, E.V., Mityukhlyaev, V.A., Muzychka, A.Yu., Nekhaev, G.V., Nesvizhevsky, V.V., Onegin, M.S., Sharapov, E.I., Strelkov, A.V.

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2016

Language:

english

File:

PDF, 1.18 MB

english, 2016

16

Scanning photoluminescence of GaAlAs/GaAs/GaAlAs binary heterostructure

V. M. Lakhov, V. B. Mityukhlyaev, A. E. Pravdivtsev, P. A. Todua, V. N. Faifer

Journal:

Measurement Techniques

Year:

2000

Language:

english

File:

PDF, 188 KB

english, 2000

17

Nonlinearity estimation of scanning on a scanning electron microscope

Alzoba, V. V., Danilova, M. A., Kuzin, A. Yu., Mityukhlyaev, V. B., Rakov, A. V., Todua, P. A., Filippov, M. N.

Journal:

Russian Microelectronics

Year:

2012

Language:

english

File:

PDF, 411 KB

english, 2012

18

Influence of contamination in scanning electron microscopes on the profile of relief elements in monocrystalline silicon

V. P. Gavrilenko, A. Yu. Kuzin, V. B. Mityukhlyaev, A. V. Rakov, P. A. Todua, M. N. Filippov, V. A. Sharonov

Journal:

Measurement Techniques

Year:

2012

Language:

english

File:

PDF, 181 KB

english, 2012

19

Development of Certified Reference Materials and Methods of Calibration of Small-Angle X-Ray Diffractometers for Certification and Standardization of Articles Produced by Nanoindustry

Avilov, A. S., Baturin, A. S., Volkov, V. V., D’yakova, Yu. A., Ermakova, M. A., Kuzin, A. Yu., Marchenkova, M. A., Mityukhlyaev, V. B., Seregin, A. Yu., Sul’yanov, S. N., Tereshchenko, E. Yu., Todua,

Journal:

Measurement Techniques

Year:

2013

Language:

english

File:

PDF, 181 KB

english, 2013

20

Features of photoinduced magnetism in some yttrium–iron-garnet single crystals

Vorob’eva, N. V., Mityukhlyaev, V. B.

Journal:

Year:

2016

Language:

english

File:

PDF, 281 KB

english, 2016

21

Project of the ultracold and cold neutron source at the WWR-M reactor with superfluid helium as a moderator

A. P. Serebrov, V. A. Mityukhlyaev, A. A. Zakharov, A. N. Erykalov, M. S. Onegin, A. K. Fomin, V. A. Ilatovskiy, S. P. Orlov, K. A. Konoplev, A. G. Krivshich, V. M. Samsonov, V. F. Ezhov, V. V. Fedoro

Journal:

Physics of the Solid State

Year:

2010

Language:

english

File:

PDF, 288 KB

english, 2010

22

Scan nonlinearity of a scanning electron microscope

V. V. Alzoba, V. P. Gavrilenko, A. Yu. Kuzin, V. B. Mityukhlyaev, A. V. Rakov, P. A. Todua, M. N. Filippov

Journal:

Measurement Techniques

Year:

2012

Language:

english

File:

PDF, 223 KB

english, 2012

23

Analysis of Factors Affecting the Accuracy of Three-Dimensional Reconstruction of the Surface of Objects with Submicrometer Relief Obtained by Scanning Electron Microscope Stereo Images

Kuzin, A. Yu., Vasil’ev, A. L., Mityukhlyaev, V. B., Mikhutkin, A. A., Todua, P. A., Filippov, M. N.

Journal:

Measurement Techniques

Year:

2016

Language:

english

File:

PDF, 196 KB

english, 2016

24

Experimental Study of Three-Dimensional Reconstruction of Relief Structures from Stereo Images Obtained in a Scanning Electron Microscope

Kuzin, A. Yu., Vasil’ev, A. L., Karabanov, D. A., Mityukhlyaev, V. B., Mikhutkin, A. A., Presnyakov, M. Yu., Todua, P. A., Filippov, M. N.

Journal:

Measurement Techniques

Year:

2016

Language:

english

File:

PDF, 335 KB

english, 2016

25

Measurement of the Thickness Nonuniformity of Nanofilms Using an Electron Probe Method

Darznek, S. A., Kuzin, A. Yu., Mityukhlyaev, V. B., Stepovich, M. A., Todua, P. A., Filippov, M. N.

Journal:

Measurement Techniques

Year:

2016

Language:

english

File:

PDF, 167 KB

english, 2016

26

Electron Probe X-Ray Analysis of Nanofilms at Off-Normal Incidence of the Electron Beam

Darznek, S. A., Mityukhlyaev, V. B., Todua, P. A., Filippov, M. N.

Journal:

Inorganic Materials

Year:

2018

Language:

english

File:

PDF, 222 KB

english, 2018

27

A new method of compositional image formation by a four-element backscattered electron detector in an SEM

V. B. Mityukhlyaev, V. G. Dyukov

Journal:

Year:

1994

Language:

english

File:

PDF, 875 KB

english, 1994

28

SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, California, United States (Sunday 25 August 2013)] Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII - Advance in dimensional measurements of nano-objects based on defocusing of the electron probe of a scanning electron microscope

Filippov, M. N., Gavrilenko, V. P., Mityukhlyaev, V. B., Rakov, A. V., Todua, P. A., Postek, Michael T., Orji, Ndubuisi George

Year:

2013

Language:

english

File:

PDF, 784 KB

english, 2013

29

The image of a line width test object in a scanning electron microscope with different energies of the probe electrons

Ch. P. Volk, V. B. Mityukhlyaev, Yu. A. Novikov, A. V. Rakov, P. A. Todua

Journal:

Measurement Techniques

Year:

2009

Language:

english

File:

PDF, 161 KB

english, 2009

30

Experimental studies of very cold neutrons passing through solid deuterium

A. P. Serebrov, E. A. Kolomenski, M. S. Lasakov, V. A. Mityukhlyaev, A. N. Pirozhkov, I. A. Potapov, V. E. Varlamov, A. V. Vasiliev, A. R. Young, A. A. Zakharov

Journal:

Year:

2001

Language:

english

File:

PDF, 61 KB

english, 2001

31

Solid deuterium source of ultracold neutrons based on a pulsed spallation source

A. P. Serebrov, V. A. Mityukhlyaev, A. A. Zakharov, T. Bowles, G. Greene, J. Sromicki

Journal:

Year:

1997

Language:

english

File:

PDF, 89 KB

english, 1997

32

Measurement of the thickness of natural oxide on a silicon relief step structure

Gavrilenko, V. P., Zablotskii, A. V., Kuzin, A. A., Kuzin, A. Yu., Kuz’min, A. A., Ermakova, M. A., Mityukhlyaev, V. B., Rakov, A. V., Todua, P. A., Filippov, M. N.

Journal:

Measurement Techniques

Year:

2013

Language:

english

File:

PDF, 140 KB

english, 2013

33

Studies of a solid-deuterium source for ultra-cold neutrons

A Serebrov, V Mityukhlyaev, A Zakharov, A Kharitonov, V Shustov, V Kuz'minov, M Lasakov, R Tal'daev, A Aldushchenkov, V Varlamov, A Vasil'ev, M Sazhin, G Greene, T Bowles, R Hill, S Seestrom, P Gelten

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2000

Language:

english

File:

PDF, 358 KB

english, 2000

34

SPIE Proceedings [SPIE International Conference on Micro-and Nano-Electronics 2012 - Zvenlgorod, Russian Federation (Monday 1 October 2012)] International Conference Micro- and Nano-Electronics 2012 - Natural oxide thickness measurements on the test silicon relief pitch structure

Filippov, M. N., Ermakova, M. A., Gavrilenko, V. P., Kuzin, A. A., Kuzin, A. Yu, Kuzmin, A. A., Mityukhlyaev, V. B., Rakov, A. V., Todua, P. A., Zablotskiy, A. V., Orlikovsky, Alexander A.

Year:

2013

Language:

english

File:

PDF, 568 KB

english, 2013

35

Change in the Chemical Composition of an Analyzed Object During Low-Voltage Electron Probe X-Ray Spectral Microanalysis

Kuzin, A. Yu., Mityukhlyaev, V. B., Todua, P. A., Filippov, M. N.

Journal:

Measurement Techniques

Year:

2017

Language:

english

File:

PDF, 139 KB

english, 2017

36

Improving the accuracy of the sem-eds analysis of microparticle composition with reduced electron probe energy and surface smoothing with an ion beam

Dyukov, V. G., Mityukhlyaev, V. B., Stebelkov, V. A., Khoroshilov, V. V.

Journal:

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

Year:

2015

Language:

english

File:

PDF, 1.92 MB

english, 2015

37

A test object with three certified linewidth dimensions for a scanning electron microscope

M. A. Danilova, V. B. Mityukhlyaev, Yu. A. Novikov, Yu. V. Ozerin, A. V. Rakov, P. A. Todua

Journal:

Measurement Techniques

Year:

2008

Language:

english

File:

PDF, 194 KB

english, 2008

38

Liquid hydrogen cold moderator optimisation at the Budapest Research Reactor

T. Grósz, V.A. Mityukhlyaev, L. Rosta, A.P. Serebrov, A.A. Zaharov

Journal:

Physica B: Condensed Matter

Year:

1997

Language:

english

File:

PDF, 154 KB

english, 1997

39

The Formation of an Oxide Film on the Surface of a Silicon Relief Structure During Plasma Cleaning

Gavrilenko, V. P., Kuzin, A. Yu., Mityukhlyaev, V. B., Stepovich, M. A., Todua, P. A., Filippov, M. N., Karabanov, D. A.

Journal:

Measurement Techniques

Year:

2015

Language:

english

File:

PDF, 123 KB

english, 2015

40

SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, California, USA (Sunday 12 August 2012)] Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI - New reference material for transmission electron microscope calibration

Filippov, M. N., Gavrilenko, V. P., Kovalchuk, M. V., Mityukhlyaev, V. B., Rakov, A. V., Todua, P. A., Vasiliev, A. L., Postek, Michael T., Coleman, Victoria A., Orji, Ndubuisi G.

Year:

2012

Language:

english

File:

PDF, 2.22 MB

english, 2012

41

Thermo-hydraulic test of the moderator cell of LH2 cold neutron source at BNC

T. Grósz, T. Hargitai, V.A. Mityukhlyaev, L. Rosta, A.P. Serebrov, A.A. Zaharov

Journal:

Physica B: Condensed Matter

Year:

2000

Language:

english

File:

PDF, 59 KB

english, 2000

42

SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Nanorelief elements in reference measures for scanning electron microscopy

Novikov, Yu. A., Darznek, S. A., Filippov, M. N., Mityukhlyaev, V. B., Rakov, A. V., Todua, P. A., Valiev, Kamil A., Orlikovsky, Alexander A.

Year:

2012

Language:

english

File:

PDF, 304 KB

english, 2012

43

Standard sample for calibration of transmission electron microscopes nanometrology

D. S. Bodunov, V. P. Gavrilenko, A. V. Zablotskii, A. A. Kuzin, A. Yu. Kuzin, V. B. Mityukhlyaev, A. V. Rakov, P. A. Todua, M. N. Filippov

Journal:

Measurement Techniques

Year:

2013

Language:

english

File:

PDF, 190 KB

english, 2013

44

Novel method for dimensional measurements of nanorelief elements based on electron probe defocusing in a scanning electron microscope

Filippov, M N, Gavrilenko, V P, Mityukhlyaev, V B, Rakov, A V, Todua, P A

Journal:

Measurement Science and Technology

Year:

2014

Language:

english

File:

PDF, 1.44 MB

english, 2014

45

Reference material for transmission electron microscope calibration

Filippov, M N, Gavrilenko, V P, Kovalchuk, M V, Mityukhlyaev, V B, Ozerin, Yu V, Rakov, A V, Roddatis, V V, Todua, P A, Vasiliev, A L

Journal:

Measurement Science and Technology

Year:

2011

Language:

english

File:

PDF, 1023 KB

english, 2011

46

Electron-Beam-Induced Transformation of Defects in Proton-Implanted CdS Single Crystals

Mityukhlyaev, V. B.

Journal:

MRS Proceedings

Year:

1995

Language:

english

File:

PDF, 292 KB

english, 1995

47

Measurements of linear dimensions of silicon nanorelief elements with a near-rectangular profile by defocusing the electron probe of a scanning electron microscope

K. A. Valiev, V. P. Gavrilenko, E. N. Zhikharev, M. A. Danilova, V. A. Kal’nov, Yu. V. Larionov, V. B. Mityukhlyaev, A. A. Orlikovskii, A. V. Rakov, P. A. Todua, M. N. Filippov

Journal:

Russian Microelectronics

Year:

2010

Language:

english

File:

PDF, 668 KB

english, 2010

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